崔海蓉;

• 1:宁波工程学院机械学院

摘要(Abstract)：

采用磁控溅射方法制备Ni纳米颗粒,使用扫描电镜(SEM)、原子力显微镜(AFM)等表征其形貌结构。采用高压溅射喷嘴结构,研究改变溅射压力等工艺参数对Ni纳米颗粒尺寸与形貌的影响。实验表明,采用高压喷嘴结构,溅射压力为20~180 Pa之间可以获得尺寸为10~100 nm的Ni纳米颗粒。采用高压溅射喷嘴结构可以得到具有晶体结构特征的Ni纳米颗粒。

关键词(KeyWords)： Ni纳米颗粒;磁控溅射;溅射压力;颗粒形貌

Abstract:

Keywords:

基金项目(Foundation): 宁波市自然科学基金(No.2011A610132);; 宁波工程学院博士科研启动基金(No.0080011540026)

作者(Author): 崔海蓉;

Email:

DOI: 10.14024/j.cnki.1004-244x.2012.03.015

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