Ag、Al掺杂对ZnO薄膜结构和光学性能的影响Effect of Ag and Al doping on structure and optical properties of ZnO thin films
秦秀娟;王佳宁;卜立敏;孙丽;孟惠民;刘日平;
摘要(Abstract)：
采用两种溶胶-凝胶工艺在普通玻璃基片上制备Ag:ZnO和Al:ZnO薄膜,通过XRD、UV-Vis吸收谱等分析方法,研究掺杂Ag和Al对半导体ZnO薄膜的组织结构和光学性能的影响。分析表明:掺杂Ag和Al对ZnO薄膜结构的影响因成胶工艺不同而有差异。但掺杂离子对ZnO薄膜光学性能的影响结论是一致的。即Al3+离子掺杂显著减小了晶粒尺寸,薄膜禁带宽度增大,紫外—可见光吸收边出现蓝移。Ag+离子掺杂增大了晶粒尺寸,薄膜禁带宽度减小,紫外—可见光吸收边出现红移。
关键词(KeyWords)： 掺杂ZnO薄膜;溶胶-凝胶法;结构特性;光学特性
基金项目(Foundation): 国家自然科学基金资助(No.50325103);; 河北省教委基金资助(No.2005309)
作者(Author): 秦秀娟;王佳宁;卜立敏;孙丽;孟惠民;刘日平;
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