韩英;李娟;

• 1:晋中职业技术学院
• 2:中国兵器科学研究院

摘要(Abstract)：

为准确评估结构尺寸、材料参数等对MEMS结构应力、应变等响应的影响,提出一种基于代理模型的MEMS结构可靠性仿真方法及程序框架。用图形化仿真工作流进行随机变量定义、有限元仿真分析程序集成、结果获取和功能函数定义,以ANSYS为例集成有限元分析程序进行结构可靠性仿真;用代理模型方法建立结构响应关于输入变量的近似模型,用设计方法尽可能减少仿真次数获得输入变量与输出变量的样本数据;基于代理模型和一次结构可靠度方法进行MEMS结构可靠度和灵敏度计算。结果表明:这种基于代理模型的MEMS结构可靠性仿真方法及程序框架可行、高效。

关键词(KeyWords)： 可靠性分析;MEMS可靠性;有限元;灵敏度

Abstract:

Keywords:

基金项目(Foundation): 国家国防科工局资助项目(Z092014B001)

作者(Author): 韩英;李娟;

Email:

DOI: 10.14024/j.cnki.1004-244x.20200915.005

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