电致发光器件衬底透镜微结构纳米热压印制备的研究Fabrication of organic light-emitting diode substrate microlens arrays using hot nanoimprinting technology
李阳;徐维;王忆;朱铭佳;邝文钊;
摘要(Abstract):
采用纳米压印技术在OLED器件衬底上制备可传递三维立体透镜微结构,可有效减小波导、增加出光耦合,从而有望增加器件出光效率。采用紫外曝光与湿法腐蚀技术相结合的方法来制备高精度的石英玻璃纳米压印模板,对模板进行清洗与抗黏连处理。结果表明:所形成的透镜微结构具有平整度好、压印精度高的特点;此种方法制备微结构工艺简单易行,可大面积实现,工艺可操作性、重复性好。
关键词(KeyWords): OLED衬底;微结构;纳米热压印
基金项目(Foundation): 广东省自然科学基金(S2011040005742,10452902001005900);; 广东省科技创新基金项目(2012KJCX0100);; 中国博士后基金(20090461297);; 江门市科技计划基金项目(2011010049758)
作者(Author): 李阳;徐维;王忆;朱铭佳;邝文钊;
Email:
DOI: 10.14024/j.cnki.1004-244x.2013.05.008
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